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HOME > Products > Heat Treatment System For Semiconductor
High performance, clean heat treatment system which meets semiconductor requirements for a high level of integration and increasing wafer size
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TEL: +81-52-561-9878 FAX: +81-52-561-6557 E-mail: heat@n.noritake.co.jp
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Vertical High Temperature Annealing Furnace (300mm/200mm)
High temperature annealing furnace for 300mm/200mm semiconductor wafers with three tube transfer system allows for high through-put.
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Vertical High Temperature Hydrogen Annealing Furnace
Vertical high temperature hydrogen annealing furnace reliably handles a large number of applications for semiconductors.
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