Control by 3 circuits (two-circuit on sidewall and one-circuit on top surface) in total.
· Two-circuit on sidewall:Save temperature difference between upper and lower.
·One-circuit on top surface:Improve temperature distribution in surface

Installation of solidification zone
· Save temperature difference between upper and lower when solidification

Ingot elevating machinery
· Save temperature difference between upper and lower when solidification

Ingot rotary machinery
· Improve temperature distribution in surface

Response to high-quality of equipment (improve conversion efficiency)

Crystal growth optimization
· Ingot elevating machinery (one direction solidification from bottom to up)
·Control plural circuit and upper circuit (improvement of temp. control)
·Ingot rotary machinery (improvement of in-plate temp. distribution)

Response to high-purified (reduction of impurity)
· Selection of optimization high-purified carbon material

Response to price-reduction of equipment.

Cast process
·Batch kiln structure　→　Improve simplification

Carbon heater
·Resistance heating structure　→　Evasion of complexity structure

Response to higher productivity of equipment

Shortening of lead time
·Response to high speed elevating temp. (forced-air cooling equipment)

Improve production
·Available for upsizing of ingot (present:700×700×260H)